Go to C:\JEOL\GonioStage
Go to "Menu(Normal)" -> Registration of Exchange position
<Y-axis is off: It should be "ON">
If still Y-axis is "off", then step move until Y-axis turn to be "ON".
(For example, current position when Y-axis is "ON" is -58.4.)
Keep moving utill Y-axis light is off.
The position is -59.4
Then, set the Y-axis to the middle of above two positions.
(-58.4-59.4)/2 = -58.9
Click Next. (Start Initialization.)
Click Finish and close the program.
Go to PC-SEM > Maintenance -> Maintenance -> Stage setting
Execute stage initialization.
After finish successfully, click OK.